On Wafer - Wireless Wafer Temperature
On Wafer - Wireless Wafer Temperature Sensor For Dry Etch Process
- Wafer size: 8″, 12″
- Temperature precision: ±0.1℃-0.2℃
- Temperature measure range: 15-100℃
- Number of measurement point: 1~81
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On Wafer – Wireless Wafer Temperature Sensor For Dry Etch Process
Product Introduction
On Wafer – Wireless Wafer Temperature Sensor is a complete measurement system embedded in a wafer that can measure and record the impact of the dry etch process environment on production wafers under actual process conditions, without the need for wired connections. The on wafer system can actually monitoring wafer temperature on dry etch process, designed to calibrate, improve uniformity and match temperature profiles.
By measuring temperature data at conditions close to the product process, the On-Wafer wireless temperature measurement system can help process engineers adjust etch process conditions, verify and match chambers, and validate after PM.
Data Sheet
| Item No. | Item | Data |
| 1 | Wafer size | 8”，12” |
| 2 | Wafer material | Silicon |
| 3 | Surface material | Silicon |
| 4 | Number of measurement point | 81/65 |
| 5 | Sensor type | IC |
| 6 | Temperature test range | Dry Etch: 15-100℃ |
| Wet Clean: 15-120℃ | ||
| 7 | Manufacturing tool temperature test range | Dry Etch: 12-85℃ |
| Wet Clean: 15-120℃ | ||
| 8 | Precision | 0.1℃/0.2℃ |
| 9 | Thickness | 1.2mm |
| 10 | Connection | RF |
| 11 | Power | battery |
| 12 | Charge | bluetooth |
| 13 | Sampling frequency | 1Hz/2Hz/4Hz |
| 14 | Application | Wet clean, Dry Etch |
| 15 | Lifespan | 6 hours in plasma-environment test |
Software demostration Interface
Applications:
Wet clean
Dry Etch
Lead Time
40 days
Customization
Wet clean
Dry Etch