TC Wafer
TC WAFER, Wired Wafer Temperature Measurement, Thermocouple Sensor
- Wafer size: 4″, 6″, 8″, 12″
- Temperature precision: ±1.1℃
- Temperature measure range: RT~1200℃
- Number of measurement point: 1~34
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TC Wafer
Product Introduction
The TC Wafer is a temperature sensor designed to enable real-time surface temperature measurement of a wafer. Using a specialized processing technique, high-temperature resistant sensors—specifically thermocouples—are embedded at designated locations on the wafer surface. This allows the TC Wafer to capture real-time temperature readings at specific points as well as the overall temperature distribution across the entire wafer. Additionally, it can be used to continuously monitor transient temperature variations during heat treatment processes, including heating, cooling, constant temperature phases, and delay periods.
Specifications
| Item No. | Item | Data |
| 1 | Precision | K:±1.1℃/0.4%; |
| R/S:±0.6℃/0.1%; | ||
| T:±0.5℃; | ||
| 2 | Measurement range | K:RT~1200℃; |
| R/S:RT~1200℃; | ||
| T:RT~350℃; | ||
| 3 | Sensor type | TC |
| 4 | TC type | K/R/S/T |
| 5 | TC wire diameter | 0.127mm(For vacuum), 0.254mm(non-vacuum) |
| 6 | Number of measurement point | 1~34 |
| 7 | Base material | Silicon/sapphire, etc. |
| 8 | Wafer size | 2”，4”，6”，8”，12” |
| 9 | Wire length | L1-Inside the chamber；L2-Chamber transition section；L3-Outside the chamber |
| 10 | Application | PVD、ALD、CVD、RTP/RTA、Stripper, Bonding(BEOL), Track, Hot plate. |
Software demostration Interface
Applications of TC Wafer
PVD
ALD
CVD
RTP/RTA
Stripper
Bonding(BEOL)
Track
Hot plate
Customization
TC Wafer can be customized to fit your need. To do custom thermocouple wafer, please provide us the information as specified below:
1. Temperature range
2. Temperature accuracy (Usually 1.1℃)
3. Wafer dimensions
4. Length of lead wire for the three segments ( L1, L2, L3)
5. Required vacuum degree
6. The number of sensors
7. Connector type (D-type or mini plug)
TC Wafer Drawings
