Feature Product
12" TC -Wafer Temperature Measurement System
- Wafer Size: 2”-12”;
- Point of Measurement: 1-34;
- Temperature Range: up to 1200℃;
- Connection: wired
Product Catalog
TC Wafer
TC Wafer is a temperature sensor that uses a special processing technology to embed high-temperature resistant sensors (thermocouples) at specific locations on the wafer surface, thus realizing real-time temperature measurement of the wafer surface.
RTD Wafer
RTD Wafer is a temperature sensor that uses a special processing technology to embed temperature sensors (RTDs) at specific locations on the wafer surface, thus realizing real-time temperature measurement of the wafer surface.
TC Wafer Wireless (On-Wafer)
The On-wafer temperature measurement System is a complete measurement system embedded in a wafer that can measure and record the impact of the etch process environment on production wafers under real process conditions, without the need for wired connections.
ATS System
The ATS Wafer can be used to locate objects by capturing images of their location and obtain offset data (X, Y) to quickly calibrate wafer transfer positions.
AMS System
The AMS system allows it to quickly measure vibration, acceleration, level, and humidity, making it a versatile and efficient solution for semiconductor equipment debugging.
AVLS System
The AVLS auto vibration and leveling system (AVLS) collectS and displayS acceleration, vibration and leveling data in real-time, enhancing the consistency and precision
Auto Leveling System (ALS)
An auto-leveling system measures X, Y horizontal movement using a combination of sensors and techniques to enhance precision, to ensure stability and safety during wafer transfer process and increase yield.
Auto Vibration System(AVS)
Through the AVS real-time detection system suitable for vacuum environments, it enables the monitoring of wafer sliding, slippage, collisions, scratches, and rough handling without interrupting the machine's operational state.
Auto Gap System
Rsuwei Auto Gap System features a negative film material made of anodized aluminum, offering excellent durability. It is suitable for 300MM wafer machine processes and is equipped with a dedicated calibration platform...
On-Wafer Monitoring Sensor For Low Temperature
On-Wafer Temperature Monitoring System is suitable for wafer temperature measurement during low-temperature dry etching, with a measurement range of -40 to 40℃.
Wireless RTD Wafer for 250℃
This RTD wafer wireless is for tesing temperature at max 250℃. It can also test at low temperature of -40℃。With precision from 0.5 to 0.05℃, this sensor is suitable for testing a strict temperature control system.
Our Advantages
Striving for excellence in temperature measurement accuracy, precision, temperature range, and customized services, ranking among the top tier of the semiconductor temperature measurement market.
> High accuracy
> Precise tempreture measurement
> Powerful thermal field system
> Highly flexible customization service
Software Demostration Interface
TC Wafer Software Interface
RTD Wafer Software Interface
On-Wafer Software Interface
AMS Wafer Software Interface
Applications
TC Wafer
> Furnace
> PVD chamber
> CVD chamber
> RTP/rta chamber
> Strippers
> Vacuum Reflow Oven
> ECP：oring（180℃-300℃）
RTD Wafer
>Front Track Systems
>Coating and Developing
>ESC for ETCH
>Hot Plates
>Cold Plates
On Wafer
>Plasma Etch poly
（EtchTemp）
>Plasma Etch metal（
EtchTemp-HD、EtchTemp SE-HD、
EtchTemp-SE）
>Ion implantation(20-140°C)
AVLS SYSTEM
> Cassette, FOUP
> Wafer robots
> Adjustment tools
> Load Locks
> Lift Pins
> Chamber bottom
> OHT system
> SMIF
AVS SYSTEM
> Cassette, FOUP
> Wafer robots
> Adjustment tools
> Load Locks
> Lift Pins
> Chamber bottom
> OHT system
> SMIF
ALS SYSTEM
> Cassette, FOUP
> Wafer robots
> Adjustment tools
> Load Locks
> Lift Pins
> Chamber bottom
> OHT system
> SMIF