Wafer Temperature Sensor & Transfer Stability Measure
Product Catalog - Wafer Temperature Sensor & Transfer Stability Measure
TC Wafer
TC Wafer is a temperature sensor that uses a special processing technology to embed high-temperature resistant sensors (thermocouples) at specific locations on the wafer surface, thus realizing real-time temperature measurement of the wafer surface.
RTD Wafer
RTD Wafer is a temperature sensor that uses a special processing technology to embed temperature sensors (RTDs) at specific locations on the wafer surface, thus realizing real-time temperature measurement of the wafer surface.
On-Wafer
The On-Wafer Temperature Measurement System is a complete measurement system embedded in a wafer that can measure and record the impact of the etch process environment on production wafers under real process conditions, without the need for wired connections.
ATS Wafer
The ATS Wafer can be used to locate objects by capturing images of their location and obtain offset data (X, Y) to quickly calibrate wafer transfer positions.
AMS Wafer
The AMS Wafer allows it to quickly measure vibration, acceleration, level, and humidity, making it a versatile and efficient solution for semiconductor equipment debugging.
AVLS (Auto Vibration And Leveling Sensor)
The AVLS auto vibration and leveling system collect and display acceleration, vibration and leveling data in real-time, enhancing the consistency and precision.
Auto Leveling System (ALS)
An auto-leveling system measures X, Y horizontal movement using a combination of sensors and techniques to enhance precision, to ensure stability and safety during wafer transfer process and increase yield.
Auto Vibration System(AVS)
Through the AVS real-time detection system suitable for vacuum environments, it enables the monitoring of wafer sliding, slippage, collisions, scratches, and rough handling without interrupting the machine's operational state.
Auto Gap System
Rsuwei Auto Gap System features a negative film material made of anodized aluminum, offering excellent durability. It is suitable for 300MM wafer machine processes and is equipped with a dedicated calibration platform...
On-Wafer Monitoring Sensor For Low Temperature
On-Wafer Temperature Monitoring System is suitable for wafer temperature measurement during low-temperature dry etching, with a measurement range of -40 to 40℃.
Our Advantages
Striving for excellence in temperature measurement accuracy, precision, temperature range, and customized services, ranking among the top tier of the semiconductor temperature measurement market!
> High accuracy
> Precise tempreture measurement
> Powerful thermal field system
> Highly flexible customization service
Applications
TC Wafer
> Furnace
> PVD chamber
> CVD chamber
> RTP/RTA chamber
> Strippers
> Vacuum Reflow Oven
> ECP：oring（180℃-300℃）
RTD Wafer
>Front Track Systems
>Coating and Developing
>ESC for ETCH
>Hot Plates
>Cold Plates
On Wafer
>Plasma Etch poly（EtchTemp）
>Plasma Etch metal（EtchTemp-HD、EtchTemp SE-HD、EtchTemp-SE）
>Ion implantation (20-140°C)
>Wet Process ( 10-120°C)
Contact Us
Send us an inquiry! We will reply within 24 hours!
FAQ
Yes. Define each length of L1, L2, L3 ( Mainly consider the length that TC-wafer placed in the chamber)
Yes. We provide flexible customization service to meet our client’s needs.
Not really the same. The temperature in process should be consider when choosing the correct item. For example, TC-wafer can test within 1200℃, but On Wafer system can only test under 100℃.
